Sapphire Wafer Parallelism Specifications

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Sapphire Wafer Parallelism

We have a large selection of inexpensive Al2O3 substrates in stock and ready to ship. Below is a question a client recently asked.

Sapphire Question:

I need to know the flatness spec (in waves per inch P-V) for double-sided polished sapphire at:

0.1 mm
0.2 mm
0.25 mm.

Answer

1# 2'' 0.1mm DSP Sapphire Wafer
Flatness : 3~5 lambda @ 633nm in test pupil (25mm) /per inch (P-V)
Diameter: 50.8±0.25mm
Orientation: C-Plane(0001) 0.2±0.1 deg off M-axis,0±0.1 deg off A-axis
Primary flat orientation :A-plane(11-20) ±0.3deg
Primary flat length: 16.0±1.0mm
Thickness: 0.1±0.025mm
Warp:</=20um
Bow: </=15um
TTV: </=10um
Micro-roughness: Ra</=1.0nm
Front surface finish: Optical-polished
Back surface finish: Optical-polished
Micro-roughness: Ra</=1.0nm
Clean room,25pcs wafer in cassette vacuum sealed

2# 2'' 0.2mm DSP Sapphire Wafer
Flatness : 2~4 lambda @ 633nm in test pupil (25mm) /per inch (P-V)
Diameter: 50.8±0.25mm
Orientation: C-Plane(0001) 0.2±0.1 deg off M-axis,0±0.1 deg off A-axis
Primary flat orientation :A-plane(11-20) ±0.3deg
Primary flat length: N/S
Thickness: 0.2±0.025mm
Warp:</=20um
Bow: </=15um
TTV: </=5um
Micro-roughness: Ra</=1.0nm
Front surface finish: Optical-polished
Back surface finish: Optical-polished
Micro-roughness: Ra</=1.0nm
Clean room,25pcs wafer in cassette vacuum sealed

3# 2'' 0.25mm DSP Sapphire Wafer
Flatness : 2~3 lambda @ 633nm in test pupil (25mm) /per inch (P-V)
Diameter: 50.8±0.25mm
Orientation: C-Plane(0001) 0.2±0.1 deg off M-axis,0±0.1 deg off A-axis
Primary flat orientation :A-plane(11-20) ±0.3deg
Primary flat length: 16.0±1.0mm
Thickness: 0.25±0.025mm
Warp:</=20um
Bow: </=15um
TTV: </=10um
Micro-roughness: Ra</=1.0nm
Front surface finish: Optical-polished
Back surface finish: Optical-polished
Micro-roughness: Ra</=1.0nm
Clean room,25pcs wafer in cassette vacuum sealed

4# 6'' 0.5mm DSP Sapphire Wafer
Flatness : 5~7 lambda @ 633nm in test pupil (25mm) /per inch (P-V)
Diameter: 150.0±0.25mm
Orientation: C-Plane(0001) 0.2±0.1 deg off M-axis,0±0.1 deg off A-axis
Primary flat orientation :A-plane(11-20) ±0.3deg
Primary flat length: 47.5±2.5
Thickness: 0.5±0.025mm
Warp:</=30um
Bow: </=25um
TTV: </=20um
Micro-roughness: Ra</=0.3nm
Front surface finish: Epi ready polished
Back surface finish: Epi ready polished
Micro-roughness: Ra</=0.3nm
Clean room,25pcs wafer in cassette vacuum sealed

Researcher Question:

Do you have a parallelism spec for each of these? Everything else is listed but that.

Below are the specs you asked for.

1# 2'' 0.1mm DSP Sapphire Wafer, parallelism</= 0.8 arc-second
2# 2'' 0.2mm DSP Sapphire Wafer, parallelism</=0.4 arc-second
3# 2'' 0.25mm DSP Sapphire Wafer, parallelism</=0.4 arc-second
4# 6'' 0.5mm DSP Sapphire Wafer, parallelism</=0.5 arc-second