SU8 Photoresist Material | UniversityWafer, Inc.

I purchased some ITO coated glass wafers last August, and have been having problems when I try to dice my parts. I bond the glass wafers to a silicon wafer using an adhesive (SU8). To do this I use an elevated temperature (110C) and pressure ~2000-2500N. Next, I dice the wafers using a dicing saw. I have performed this process without issue with borofloat glass, however, with these wafers whenever I dice my parts the glass cracks.

Can you please provide more information about the type of glass used? I believe the part number is 34490. They are <10 ohms/square SiO2 wafers. Can you provide any guidance about the strength of the glass and possibly different parameters to adjust to prevent the glass from cracking?

Aternatively, can you coat borofloat wafersor provide me with ITO coated glass wafers that will withstand my process?

Additionally, this batch of wafers I have received appears to be significantly larger than 4” in diameter. I have not yet measured the diameter, but it appears to be at least 105-110mm in diameter.

Can you provide additional information about your ITO coated glass wafers? Do you know what the coefficient of thermal expansion is? Additionally, the wafers I received are 4 1/16 inches rather than 4 inches in diameter.

The glass substrates are made by LCD display grade float glass, different from Borofloat. To cut the ITO glass, it is not required to cut through the substrates. A light scratch on the glass surface is good enough. The glass can be then spitted easily by hands. Currently, we are planning borofloat or BK7 for ITO coating check back soon.

What is SU8 Passivation?

SU-8 is a commonly used epoxy-based photoresist material in microfabrication and MEMS/NEMS technology. Passivation is a process used to protect the surface of a material from environmental or chemical damage.

In the context of SU-8, passivation typically involves coating the surface of the cured SU-8 with a thin layer of material, such as a polymer or metal, to improve its chemical resistance, protect it from degradation, and prevent unwanted adhesion of biological or chemical species.

SU-8 passivation is an essential step in the fabrication of microfluidic devices, biosensors, and other micro-electromechanical systems. It helps to ensure the stability and longevity of the devices by preventing corrosion, leakage, and unwanted interactions with the surrounding environment.

What SU-8 are Used to Make PDMS Molds to Fabricate Biomaterials Design?

Hi, I am trying to repeat a biomaterials design for making PDMS molds. I learned that my collaborators purchased mechanical-grade, silicon wafers from your company and wish to do the same. Is it possible to provide you a pre-designed mask so the silicon wafers can be pre-treated with a negative photoresist such as SU-8 3010, treated with UV and cleaned off? We are looking for 125mm diameter silicon wafers and am interested in small scale bulk order (5-10) while we provide the masks. Look forward to your response.

I am looking for a wafer that is thicker so it is more sturdy for repeated PDMS casting. We want a SU-8 3010 photoresist treatment that will generate a >10 micron negative allowing us to cast the PDMS and use it for biomaterial production for culturing human cells.

Do you have any recommendations based on your former clients?

We can definitely supply our item ID # 2452, however, this item is mechanical grade and we do not guarantee the quality of this item, it is sold "as-is". Also I am still checking on our ability to do the photoresist treatment and PDMS casting.

What Substrate is Used to Fabricate Flexible Substrates?

University Biomedical researchers have used the following silicon wafers to develop SU-8 wafer templates to fabricate flexible substrates from SU-8 wafers.

What Silicon Wafer is Suitable for SU-8 Lithography?

Can you send me a quote for silicon wafer suitable for SU-8 lithography. I want totally 50 wafers. I want 4" wafer suitable for SU-8 lithography. Also, I may want a few 6" wafer for AZ positive photoresist lithography.

Substrates used for SU8

Substrates Used for Good SU8 Adhesion

What Substrates are Used to Make SU8 Masks?

Borofloat 33 Substrates to Make SU-8 Microfluidic Devices

How to Bond Silicon to Glass Wafers?

What is SU8 Passivation?

What SU-8 are Used to Make PDMS Molds to Fabricate Biomaterials Design?

What Substrate is Used to Fabricate Flexible Substrates?

What Silicon Wafer is Suitable for SU-8 Lithography?